Substrate/Film Coating and Drying Equipment

Related Contract Testing

FLOLIA® Coater System

Unit Specifications

• Maximum substrate size: 400 mmW × 500 mmL
• Coating thickness: ≥ 1 μm wet (100 nm – 1,000 μm dry)
• Coating viscosity: 0.001 – 100 Pa∙s (1 – 100,000 cps)
• Coating speed: ≤ 200 mm/sec
• Installation environment: Class 10

System Process

• Pre-coating substrate cleaning apparatus: E-UV, Wet cleaning
• Coater: SLIT COATER
• Reduced pressure drying apparatus: Heat treatment process-capable
• Hot plate
• Clean oven: N2 atmosphere-compatible, Max. 500℃
• Film defect inspection apparatus
• Offline film thickness measurement apparatus: Optical

FLOLIA® 3000 Coater System

Unit Specifications

• Maximum substrate size: 1,850 mmW × 1,500 mmL
• Coating thickness: ≥ 1 μm wet (100 nm – 1,000 μm dry)
• Coating viscosity: 0.001 – 100 Pa∙s (1 – 100,000 cps)
• Coating speed: ≤ 200 mm/sec

System Process

• Coater: SLIT COATER
• Reduced pressure drying apparatus: Heat treatment process-capable
• Hot plate
• Film thickness measurement: Coater accessory function

RS Coater

Unit Specifications

• Maximum substrate size: 4 – 18 inch (φ450 mm)
• Coating thickness: 50 – 200 μm wet and up
• Coating viscosity: 500 – 15,000 Pa∙s (cps)

System Process

• Coater: SLIT COATER

Clean Oven

Unit Specifications

• Maximum substrate size: G2.5 – G6
• Heating system: Convection type (heated air circulation system)
• Maximum temperature: Max. 550℃
• Furnace interior O2 temperature: ≤ 10 ppm (when using pure N2)

System Process

• Oven
• Film defect inspection apparatus

Contract Testing Requests and Inquiries

• As a rule, there is a charge for testing. (Details of the testing to be performed will be included with the cost estimate provided after application confirmation.)
• If you would like to have testing performed, please click the “Contract Testing Request” button below, fill in the essential fields on the “Testing Request Form” and then submit it.
• Testing requests may be declined, depending upon the content of the request.
• There may be a significant waiting period for testing completion, depending upon the usage status of the testing unit.

* Chugai Ro has testing equipment available for use as part of business discussions with customers interested in systems and equipment purchase and installation. Piecework, once-off testing and other requests are not accepted.

→Contract Testing Request