Single-wafer RS coater (rectangular, circular, and odd-shaped coatings possible)

Single-wafer RS coater (rectangular, circular, and odd-shaped coatings possible)

The die head is equipped with a unique width-changing mechanism! Applicable to various shapes of coating regardless of substrate shape.

forte
  • Unique width-changing mechanism enables various coating shapes
  • Pattern application minimizes material loss
  • Unique width-changing mechanism improves dispensing response speed
  • High dispensing stability at the beginning and end of the dispensing process
  • Realization of sharp corner edges
    (It is also possible to make a R section by using a width-changing mechanism.)
  • No need for troublesome correction recipes at the beginning and end of the process
  • Suitable for high-viscosity coating liquids and thick film applications
    (No need for overcoating even with a film thickness of several hundred micrometers)
  • Single-wafer system allows for small turnaround and can be applied to roll-to-roll prototypes and medium-volume production
Example of application
Contribute to the promotion of ESG, SDGs and other activities
Video of deformed application
Excellent film thickness accuracy (uniformity)
Enables coating in low viscosity areas! Thin coating of low viscosity coating liquid is possible when applied to the entire surface of the substrate
For high viscosity liquids
Comparison Table Covers all diverse applications
By Application /
By Product		 RS coater (RS-422) slit
coota		 ink
jet		 diss
penser		 screen
Printing
deformed application ● ● ● ●
High viscosity application ● ● ● ●
Continuous Coating ● ● ● ●
Thick Film Coating ● ● ●
High-speed dispensing ● ●
Specifications
Coating width Max 300mm(Wide nozzle under development)
viscosity Several mPa-s (cps) to 50,000 mPa-s (cps)
Coating thickness ～1,000μm/Wet
Film thickness accuracy ±3-5% or less
Coating liquid usage efficiency 90% or more

*Corresponding viscosity can be discussed depending on application conditions.
*Compatible with coating under low dew point atmosphere.
Product Introduction Video
Operation Explanatory Video
Wheel Coater Intermittent Video
Wheel Coater Application Video
System Support

We also offer proposals in the form of systems.
Example process flow:
Load port (EFEM) → Alignment → Coater → BAKE → CP → Load port (EFEM)
Drying Process Option: VCD (vacuum drying device)
Firing Process Option: Can be combined with Cure Oven, etc.

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